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经营范围
发明名称
SUBSTRATE CLEANING APPARATUS
摘要
申请公布号
KR20110105327(A)
申请公布日期
2011.09.26
申请号
KR20100110982
申请日期
2010.11.09
申请人
DAI NIPPON SCREEN MFG. CO., LTD.
发明人
KAWAKAMI TAKUTO
分类号
H01L21/302
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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