发明名称 ENHANCED VISION SYSTEM FOR SCREEN PRINTING PATTERN ALIGNMENT
摘要 Embodiments of the invention also generally provide a solar cell formation process that includes the formation of metal contacts over heavily doped regions that are formed in a desired pattern on a surface of a substrate. Embodiments of the invention also provide an inspection system and supporting hardware that is used to reliably position a similarly shaped, or patterned, metal contact structure on the patterned heavily doped regions to allow an Ohmic contact to be made. The metal contact structure, such as fingers and busbars, are formed on the heavily doped regions so that a high quality electrical connection can be formed between these two regions.
申请公布号 KR20110105382(A) 申请公布日期 2011.09.26
申请号 KR20117016082 申请日期 2009.10.02
申请人 APPLIED MATERIALS, INC. 发明人 GALIAZZO MARCO;WEIDMAN TIMOTHY W.;BACCINI ANDREA;PAAK SUNHOME (STEVE);FANG HONGBIN;ZHANG ZHENHUA
分类号 H01L31/18;H01L21/027;H01L21/20;H01L31/042 主分类号 H01L31/18
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