| 摘要 |
PROBLEM TO BE SOLVED: To provide a member for producing polycrystalline silicon, which is a cylindrical member used as a reaction tube for a raw gas in the production of the polycrystalline silicon by a vapor-to-liquid deposition method, and by which the concentration of carbon in formed silicon attributable to the composition of the member is reduced, and to provide a method for producing the member. SOLUTION: A protective film 2 is formed on the inner surface of a cylindrical base material 1 made of carbon, and the protective film 2 is composed of a silicon carbide layer 2a formed on the inner surface of the cylindrical base material 1 and a silicon oxynitride layer 2c formed on the silicon carbide layer 2a and having a composition represented by SiO<SB>x</SB>N<SB>y</SB>(x>0, y>0). COPYRIGHT: (C)2011,JPO&INPIT
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