发明名称 LARGE SCALE METHOD AND FURNACE SYSTEM FOR SELENIZATION OF THIN FILM PHOTOVOLTAIC MATERIALS
摘要 A method for fabricating a copper indium diselenide semiconductor film is provided using substrates having a copper and indium composite structure. The substrates are placed vertically in a furnace and a gas including a selenide species and a carrier gas are introduced. The temperature is increased from about 350° C. to about 450° C. to initiate formation of a copper indium diselenide film from the copper and indium composite on the substrates.
申请公布号 US2011229989(A1) 申请公布日期 2011.09.22
申请号 US20090568644 申请日期 2009.09.28
申请人 STION CORPORATION 发明人 WIETING ROBERT D.
分类号 H01L21/66;H01L21/10 主分类号 H01L21/66
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