发明名称 ELECTROLYTE LOOP WITH PRESSURE REGULATION FOR SEPARATED ANODE CHAMBER OF ELECTROPLATING SYSTEM
摘要 An electrolyte, and particularly anolyte, may be circulated via an open loop having a pressure regulator, so that the pressure in the plating chamber is maintained at a constant (or substantially constant) value with respect to atmospheric pressure. In these embodiments, a pressure regulator is in fluid communication with the anode chamber.
申请公布号 US2011226614(A1) 申请公布日期 2011.09.22
申请号 US201113051822 申请日期 2011.03.18
申请人 发明人 RASH ROBERT;ABRAHAM RICHARD;PORTER DAVID W.;MAYER STEVEN T.
分类号 C25B15/08;C25B15/00;C25B15/02 主分类号 C25B15/08
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