| 摘要 |
<p>Provided is a new method for supplying a liquefied gas, said method enabling a gas of high purity, containing little moisture, to be stably supplied in large volumes. In the method for supplying liquefied gas, a filling container is filled with liquefied gas, gas is extracted from the gas phase section of the liquefied gas, and supplied. The liquefied gas within the filling container continuously or intermittently circulates from the liquid phase section within the filling container to the gas phase section or liquid phase section within the filling container through a pipe. One end of the pipe communicates with the liquid phase section within the filling container, and the other end of the pipe communicates with the gas phase section or the liquid phase section within the filling container. At least a portion of the liquefied gas that is to be circulated evaporates due to heating while circulating. The liquefied gas that has been circulated subsequently returns to the gas phase section or the liquid phase section at the other end of the pipe. The method for supplying liquefied gas includes the aforementioned "return" step.</p> |
