| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a piezoelectric actuator that causes small variations in the hysteresis characteristics of a piezoelectric element. <P>SOLUTION: In a spatter etching for improving adhesion with an upper electrode 80 and lead electrode, the residence time of Ar ions on a surface of the upper electrode 80 is reduced by Ar gas flow carried out by Ar gas introduction by spatter etching the surface of the upper electrode of 80 while introducing the Ar gas at a flow rate of 60 sccm or greater. Thus, charge-up caused by ionized Ar gas residing on the surface of the upper electrode 80 is suppressed, and the effect to a piezoelectric element 300 by the charge-up is small. This results in obtaining a method of manufacturing the piezoelectric actuator that causes small variations, of not only the hysteresis characteristics but also the displacement characteristics, in a piezoelectric layer 70 of the piezoelectric element 300. <P>COPYRIGHT: (C)2011,JPO&INPIT |
