| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method and an apparatus which prevent decrease in the function of a purification catalyst, reduce purification load and contribute toward reduction of the management expenses and construction cost of recovery equipment, by increasing the purity of recovered impurity-containing argon gas by a rational purification treatment. <P>SOLUTION: When argon gas containing at least oxygen, hydrogen, carbon monoxide and nitrogen as impurities is purified, oxygen molar concentration in the argon gas is set to <1/2 of the sum of carbon monoxide molar concentration and hydrogen molar concentration. Oxygen in the argon gas is then reacted with carbon monoxide and hydrogen in the presence of a catalyst which gives priority to the reaction of carbon monoxide and oxygen over the reaction of hydrogen and oxygen, whereby carbon dioxide and water are generated while leaving hydrogen. Thereafter, the content of impurities in the argon gas is reduced with an adsorbent. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
