| 摘要 |
PROBLEM TO BE SOLVED: To solve such a problem that in a conventional substrate with a transparent electrode, surface roughness depends on the substrate, the surface roughness on the ground layer or the transparent electrode layer formed thereon cannot be controlled, and therefore the control of unevenness of the order of micrometers or less cannot be performed and there is a limit for an optical design. SOLUTION: In the substrate with the transparent electrode, a part or whole of the layer including granular silicon oxide is used for the ground layer, the control of the nano-sized unevenness and the control of refraction index are possible, and the optical characteristic of the substrate with the transparent electrode can be largely improved as a result. COPYRIGHT: (C)2011,JPO&INPIT |
