| 摘要 |
PROBLEM TO BE SOLVED: To perfectly remove cullet produced when a brittle material substrate is subjected to scribing. SOLUTION: The circumference of the chip of a scribing head is jetted with air, and is further fitted with a nozzle 10 sucking the jetted air. The nozzle 10 includes a plurality of air jet holes provided toward the center of a through-hole 23 and a suction hole sucking the air from the through-hole, and in which the air-jet holes are connected with a pump press-feeding the air, and the suction hole is connected with a dust collector. In this way, the air is jetted from the pump upon scribing, the jetted air including cullet after the scribing whirls up so as to collect dust, and the cullet can be separated. COPYRIGHT: (C)2011,JPO&INPIT
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