| 摘要 |
A physical quantity sensor includes: a semiconductor laser which emits laser light to a measurement target; an oscillation wavelength modulating device that operates the semiconductor laser such that at least one of a first oscillation period and a second oscillation period alternately exists; a detector that detects an electrical signal including interference waveforms, the interference waveforms being caused by a self-coupling effect of the laser light and return light from the measurement target; a signal extracting device that measures each cycle of the interference waveforms whenever the interference waveform is input; a cycle correcting device that compares each cycle of the interference waveforms with a reference cycle to correct the cycles of the interference waveforms; and a calculating device that calculates at least one of displacement and velocity of the measurement target based on each of the cycles of the interference waveforms corrected by the cycle correcting device. |
