| 摘要 |
<P>PROBLEM TO BE SOLVED: To obtain an optimal photoreceptor for forming a latent image, by measuring an electrostatic latent image that is two-dimensionally formed on a photoreceptor for electrophotography at high speed and with high accuracy. <P>SOLUTION: An electron beam irradiation part (charged particle optical system 2) generates electron beams, and an optical write scanning unit (exposure optical system 5) performs irradiation of a photoreceptor sample 31 with use of a luminous flux diameter and a luminous flux profile from a light source 51 in appropriate exposure time and exposure energy. The two-dimensional high speed and high accuracy electrostatic latent image can be formed by using the luminous flux from the light source 51 for scanning in the main scanning direction with use of a deflector by reflection and in the sub-scanning direction with use of a diffraction optical deflection element 54 (deflector by diffraction). The optimal photoreceptor is obtained by measuring the electrostatic latent image with high accuracy by electron beam irradiation, thereby forming a high-density and high-quality image. <P>COPYRIGHT: (C)2011,JPO&INPIT |
