PROXIMITY EXPOSURE DEVICE, GAP CONTROL METHOD THEREOF, AND METHOD FOR MANUFACTURING DISPLAY PANEL SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To control a gap between a mask and a substrate in a short time by preventing a mask holder from falling after gap adjustment, when the gap between the mask and the substrate is controlled by moving and tilting the mask holder in a Z direction, while supporting the mask holder by air pressure.

SOLUTION: Compressed air is supplied from a pneumatic circuit to a pneumatic support device 23, and a mask holder 20 is supported by air pressure of the pneumatic support device 23. A gap between a mask 2 and a substrate 1 is adjusted, by moving and tilting the mask holder 20 with a plurality of Z-tilt mechanisms 30 in the Z direction, while sealing air in the pneumatic support device 23 by cutting off the pneumatic support device 23 from the pneumatic circuit. Since the air does not flow out from the pneumatic support device 23 after gap adjustment, the mask holder 20 does not fall.

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