| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of cleaning a metallic member by which the metallic member is dried by efficiently removing a cleaning liquid using an aqueous solution or an organic solvent from the surface of the metallic member after cleaning the surface of the metallic member with the cleaning solution and when using the organic solvent, the organic solvent is recovered while suppressing the diffusion of the organic solvent in the atmosphere to the utmost. SOLUTION: In the method of cleaning the metallic member by cleaning the surface of the metallic member with the cleaning liquid and drying the metallic member to remove the cleaning liquid from the surface of the metallic member, the metallic member is dried using a drying apparatus 2 constituted so that a distribution channel of a gas is turned into a closing system circulating rout by connecting a gas circulating pipe 6, a gas-liquid separator 7 and a pump 8 or a blower through a pipe line 9. The gas circulating pipe 6 has an inlet 3 and an outlet 4 in the side wall through which the metallic member 1 is passed and has a nozzle 5 arranged inside so as to discharge a gas therein toward the metallic member 1 passed through the inlet 3 and the outlet 4. COPYRIGHT: (C)2011,JPO&INPIT
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