发明名称 Under-Bump Metallization Structure for Semiconductor Devices
摘要 An under-bump metallization (UBM) structure for a semiconductor device is provided. A passivation layer is formed over a contact pad such that at least a portion of the contact pad is exposed. A protective layer, such as a polyimide layer, may be formed over the passivation layer. The UBM structure, such as a conductive pillar, is formed over the underlying contact pad such that the underlying contact pad extends laterally past the UBM structure by a distance large enough to prevent or reduce cracking of the passivation layer and or protective layer.
申请公布号 US2011227216(A1) 申请公布日期 2011.09.22
申请号 US20100725322 申请日期 2010.03.16
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 TSENG MING-HUNG;CHEN CHEN-SHIEN;KUO CHEN-CHENG;CHEN CHIH-HUA;HSIAO CHING-WEN
分类号 H01L23/498;H01L21/60 主分类号 H01L23/498
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