发明名称 |
ELECTRONICS DEVICE, SEMICONDUCTOR DEVICE, AND METHOD FOR MANUFACTURING THE SAME |
摘要 |
It is an object of the present invention to provide a high reliable EL display device and a manufacturing method thereof by shielding intruding moisture or oxygen which is a factor of deteriorating the property of an EL element without enlarging the EL display device. In the invention, application is used as a method for forming a high thermostability planarizing film 16, typically, an interlayer insulating film (a film which serves as a base film of a light emitting element later) of a TFT in which a skeletal structure is configured by the combination of silicon (Si) and oxygen (O). After the formation, an edge portion or an opening portion is formed to have a tapered shape. Afterwards, distortion is given by adding an inert element with a comparatively large atomic radius to modify or highly densify a surface (including a side surface) for preventing the intrusion of moisture or oxygen.
|
申请公布号 |
US2011227126(A1) |
申请公布日期 |
2011.09.22 |
申请号 |
US201113150614 |
申请日期 |
2011.06.01 |
申请人 |
SEMICONDUCTOR ENERGY LABORATORY CO., LTD. |
发明人 |
YAMAZAKI SHUNPEI;NAGAI MASAHARU;NAKAMURA OSAMU |
分类号 |
G02F1/1368;H01L33/48;G02F1/1362;G09F9/00;G09F9/30;H01L21/77;H01L21/84;H01L23/053;H01L27/12;H01L27/32;H01L51/50;H01L51/52;H05B33/04;H05B33/10;H05B33/22 |
主分类号 |
G02F1/1368 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|