发明名称 OPTICAL COLLECTOR FOR COLLECTING EXTREME ULTRAVIOLET RADIATION, METHOD FOR OPERATING SUCH AN OPTICAL COLLECTOR, AND EUV SOURCE WITH SUCH A COLLECTOR
摘要 An optical collector (15) for collecting extreme ultraviolet radiation or EUV light generated at a central EUV production site comprises a reflective shell (25). To cope with the thermal loading of the collector and thereby avoid deformations, the reflective shell (25) preferably is mounted on and supported by a support structure (24), such that a cooling channel (29) is established between the back side of the reflective shell (25) and the support structure (24), the thickness of the reflective shell (25) is substantially reduced, such that the convective heat transfer between the back side of the reflective shell (25) and a cooling medium (26) flowing through the cooling channel (29) dominates the process of removing heat from the reflective shell (25) with respect to heat conduction, and a cooling circuit (33) is connected to the cooling channel (29) to supply a cooling medium (26) to the cooling channel (29) with a controlled coolant pressure and/or mass flow.
申请公布号 WO2011113591(A2) 申请公布日期 2011.09.22
申请号 WO2011EP01305 申请日期 2011.03.16
申请人 ETH ZURICH;DIETERICH, FRANZ;ABHARI, REZA;GIOVANNINI, ANDREA;AGA, VIPLUV 发明人 DIETERICH, FRANZ;ABHARI, REZA;GIOVANNINI, ANDREA;AGA, VIPLUV
分类号 G03F7/20 主分类号 G03F7/20
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