| 发明名称 |
SUBSTRATE TREATMENT APPARATUS |
| 摘要 |
<p>Disclosed is an operating unit equipped with an operating screen and a mounting unit, that includes data authentication means that complete a log-in if authentication data is verified and the authentication data is registered, when a device including authentication data such as at least a user ID and user password is inserted into the mounting unit; and display control means that switch at least a part of a display of the operating screen when the log-in is completed.</p> |
| 申请公布号 |
WO2011115249(A1) |
申请公布日期 |
2011.09.22 |
| 申请号 |
WO2011JP56544 |
申请日期 |
2011.03.18 |
| 申请人 |
HITACHI KOKUSAI ELECTRIC INC.;NOGAMI SHIGEKI |
发明人 |
NOGAMI SHIGEKI |
| 分类号 |
H01L21/02;G06F21/31;G06F21/34;G06F21/44 |
主分类号 |
H01L21/02 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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