SALT, ACID GENERATOR, RESIST COMPOSITION, AND METHOD FOR PRODUCING RESIST PATTERN

摘要

PROBLEM TO BE SOLVED: To provide a resist composition having good resolution of a pattern obtained therefrom, and to provide a salt and an acid generator for obtaining the composition.

SOLUTION: There is provided a salt represented by formula (I) (wherein Q1and Q2are each independently fluorine or 1C-6C perfluoroalkyl; L1is divalent 1C-17C saturated hydrocarbon, and -CH2- included in the saturated hydrocarbon may be substituted by -O- or -CO-; and Z1+is an organic cation). There are also provided an acid generator including the salt, and a resist composition including the acid generator and a resin.

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