发明名称 HIGHLY INSULATING AND HIGHLY STABLE PIEZOELECTRIC LTGA SINGLE CRYSTAL, METHOD FOR PRODUCING THE SAME, AND PIEZOELECTRIC ELEMENT AND COMBUSTION PRESSURE SENSOR USING THE LTGA SINGLE CRYSTAL
摘要 <P>PROBLEM TO BE SOLVED: To provide a method which allows the production of a highly insulating and highly stable LTGA (La<SB>3</SB>Ta<SB>0.5</SB>Ga<SB>5.5-x</SB>Al<SB>x</SB>O<SB>14</SB>) single crystal usable for a piezoelectric element of a highly reliable combustion pressure sensor useful for measuring the combustion pressure in a combustion chamber of an internal combustion engine. <P>SOLUTION: In the method for producing the LTGA single crystal from a polycrystalline starting raw material prepared by using a mixture of La<SB>2</SB>O<SB>3</SB>, Ta<SB>2</SB>O<SB>5</SB>, Ga<SB>2</SB>O<SB>3</SB>, and Al<SB>2</SB>O<SB>3</SB>, a mixture having a composition represented by formula: y(La<SB>2</SB>O<SB>3</SB>)+(1-x-y-z)(Ta<SB>2</SB>O<SB>5</SB>)+z(Ga<SB>2</SB>O<SB>3</SB>)+x(Al<SB>2</SB>O<SB>3</SB>), wherein 0<x&le;0.40/9, 3.00/9<y&le;3.23/9, and 5.00/9&le;z<5.50/9, is used as the polycrystalline starting raw material, and the LTGA single crystal is grown by using the crystal growth axis as the z-axis. It is preferable to subject the grown LTGA single crystal to a vacuum heat treatment. <P>COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011184263(A) 申请公布日期 2011.09.22
申请号 JP20100053272 申请日期 2010.03.10
申请人 CITIZEN FINETECH MIYOTA CO LTD;OXIDE CORP 发明人 HAYASHI TAKAYUKI;ARIGA TOSHIMITSU;MATSUKURA MAKOTO;ANZAI YUTAKA;MIYAMOTO AKIO;MATSUMURA SADAO;FURUKAWA YASUNORI
分类号 C30B29/30;C30B33/02;H01L41/08;H01L41/18;H01L41/22;H01L41/39;H01L41/41 主分类号 C30B29/30
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