| 摘要 |
PROBLEM TO BE SOLVED: To obtain a distortion-free image. SOLUTION: A proofreading member 20 is arranged on a primary image-forming plane formed between a converging lens and an objective lens, each arranged in an optical path extending from a scanning mirror by which laser-beam scanning is made, to a sample. The proofreading member 20 has: an aperture part 41 which opens in correspondence to a passing range in which laser beams pass through the primary image-forming plane when scanning is made with the laser beams in an observational visual field; and graduations 42-1 to 42-4 for proofreading, on which a plurality of marks are marked at regular intervals, in the vicinity of the aperture part 41. COPYRIGHT: (C)2011,JPO&INPIT
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