| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of controlling water spray humidification of a clean room and a humidification control system capable of keeping an internal humidity of the clean room to a target humidity. SOLUTION: The method includes a stage for detecting humidify change of circulated air in each control group by a humidity sensor, a stage for transmitting the humidity detected by the humidity sensor to a control section, a stage for receiving a transmitted signal to perform operation in the control section, and determining availability of humidification, a stage for supplying atomized spray water by operating a humidifying section on the basis of a demand of humidification, and a stage for receiving humidity information of the clean room by connecting the information to the humidity of each control group to a central computer. COPYRIGHT: (C)2011,JPO&INPIT
|
