COATING FILM FORMING APPARATUS AND COATING FILM FORMING METHOD,申请号KR20050017748-传众专利搜索

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发明名称	COATING FILM FORMING APPARATUS AND COATING FILM FORMING METHOD
摘要
申请公布号	KR101067143(B1)	申请公布日期	2011.09.22
申请号	KR20050017748	申请日期	2005.03.03
申请人		发明人
分类号	B05C5/02;B05D1/26;B05C11/10;B05D3/00;H01L21/027	主分类号	B05C5/02
代理机构		代理人
主权项
地址

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