| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser oscillator where a bearing or the whole gas laser oscillator is not damaged easily even upon the poor lubrication of the bearing in a blower. <P>SOLUTION: The laser oscillator includes a vibration sensor 9 installed in a blower 4, and a comparator 11 which determines whether an oscillating signal value detected by the vibration sensor 9 is larger than or equal to a preset oscillation reference value or not, and outputs a reference value excess signal if it is larger than or equal to the oscillation reference value. When the reference value excess signal is outputted from the comparator 11, a gas pressure controller 17 controls the gas pressure of laser medium gas in an optical resonator 1 to be lower than predetermined operation gas pressure by controlling at least either a gas supply unit 13 or a gas discharge unit 14. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
