A PALETTE SYSTEM FOR THIN FILM DEPOSITION FACILITIES FOR COLLECTING AND RECOVERING DEPOSITED MATERIALS

摘要

Device for the collection and recovery of materials in thin-film deposition facilities, characterized by elements (3) able to intercept the wasted fraction of materials in deposition processes. These elements are: disposed in individual modules (1, 5), possibly combined in multiple configurations according to the shape of the deposition chamber; swivel, depending on the material to be recovered, thanks to an electro-mechanical driver (4), mechanical transmission systems (6, 10, 15a, 15b), electronic interface (9) between the driver (4) and the software/panel control of the deposition process, so to automatize the rotation of the elements; removable; separable from the collected material. In particular, these elements can be palettes (3) placed vertically in each of the modules (1, 5), made of a composite material, characterized by a core of metallic material or alumina (both fit for Ultra High Vacuum conditions), and by two surface polymeric layers with low adhesion to the selected core and therefore easily removable, but at the same time resistant to the temperature-pressure conditions of the deposition chamber.