| 摘要 |
<P>PROBLEM TO BE SOLVED: To confirm the positioned state of a plate-like member, without fail. <P>SOLUTION: A device is provided with a stage 5 for positioning on which a piezoelectric element 3 is placed; through-holes 35 and 37, formed through the stage part 5 and closed in the positioned state of the piezoelectric element 3; and a flow-rate measuring unit 39, which pulls in air through the through-holes 35 and 37 and confirms the positioned state of the piezoelectric element 3 according to the flow rate of the gas. Consequently, the piezoelectric element 3 is attracted by pulling in the gas to be positioned on the stage 5, without fail, and the positioned state of the piezoelectric element 3 is confirmed readily and surely in such a state. <P>COPYRIGHT: (C)2011,JPO&INPIT |
