| 摘要 |
<P>PROBLEM TO BE SOLVED: To evaluate a state of a wave front of light passing through an inspected optical system with high accuracy in a short time. <P>SOLUTION: The evaluation method of a wave front of object light includes: the step for determining a phase of a shearing wave front in an x direction and a y direction of object light based on intensity distribution of an interference fringe of the object light and luminous flux obtained by relatively shifting the object light; the step for defining a phase of a pixel in a defined region 25A; and the step for determining a phase of the object light based on a phase of a pixel P (m, n) which is adjacent to a pixel P (m-1, n) in the defined region 25A, and a phase difference between the pixel P (m-1, n) and P (m, n), for the pixel P (m-1, n) which is adjacent to the defined region 25A along an integration route 27A. <P>COPYRIGHT: (C)2011,JPO&INPIT |
