摘要 |
In a manufacturing method of a straight word line NOR flash memory array, a source line is implanted after the formation of a word line in the NOR type flash memory array is completed, and a discrete implant region is formed in the NOR type flash memory array and parallel to a component isolation structure, and each discrete implant region constitutes an electric connection with a low impedance between a source line and source contacts on the source line. With such discrete distribution, adjacent memory cells will not be short-circuited or failed even if a deviation of a mash occurs during the manufacturing process.
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