| 摘要 |
PROBLEM TO BE SOLVED: To provide a grinding machine without risk of work damage, applicable even to a work having no electric conductivity, and having the function for measuring a vertical directional distance between a grinding wheel and the work. SOLUTION: This grinding machine is provided for grinding the work by relatively moving the rotating grinding wheel to the work set on a chuck upper surface, and includes a microscope movable in the vertical direction, a CCD camera for photographing an image of the microscope and an image processing device for measuring the vertical directional distance between a reference surface of the microscope and an observation object of the microscope by processing the image photographed by the CCD camera. The grinding machine with the distance measuring function is characterized in that the image processing device measures the vertical directional distance between the reference surface of the microscope and the observation object based on sharpness being a degree of whether or not a focus of the microscope is adjusted. COPYRIGHT: (C)2011,JPO&INPIT |
