| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a liquid-repellent resist composition having good storage stability, hardly causing foreign matter at film formation, and having excellent liquid-repelling properties. <P>SOLUTION: The liquid-repellent resist composition contains (A1) a fluoropolymer containing (a1) 100 pts.wt. of an α-substituted acrylate having a 4-8C fluoroalkyl group (which may have an ethereal oxygen atom between carbon atoms), (a2) 5-80 pts.wt. of an epoxy group-containing monomer and (a3) 10-40 pts.wt. of a monomer containing an alkylene oxide group represented by (R<SP>1</SP>O)<SB>n</SB>R<SP>2</SP>, as repeating units, and having the fluorine concentration of 15-40 wt.% in the fluoropolymer (A1), and the weight average molecular weight of 3,000-20,000. <P>COPYRIGHT: (C)2011,JPO&INPIT |
