| 摘要 |
PROBLEM TO BE SOLVED: To promote miniaturization with a simple structure and achieve highly precise beam scanning in a broad range. SOLUTION: A laser beam scanning apparatus is structured such that a turnably reflection mirror 13 is turnably arranged at an arbitrary position which is on an optical axis between a first optical system 111 and a second optical system 112 in a beam expander 11 according to magnification of beam scanning and which is set based on a ratio of a distance f1 from the focus F of the second optical system 112 to a distance f2 from the second optical system 112. The reflection mirror 13 is controllably rotated and a beam deviation angle of a laser beam introduced into the first optical system 111 in the beam expander 11 is controlled according to the rotation angle of the reflection mirror, thereby performing beam scanning in the target direction from the second optical system 112. COPYRIGHT: (C)2011,JPO&INPIT
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