发明名称 |
SEMICONDUCTOR OXIDE NANOFIBER-NANOROD HYBRID STRUCTURE AND ENVIRONMENTAL GAS SENSOR USING THE SAME |
摘要 |
Provided is an environmental gas sensor including an insulating substrate, a metal electrode formed above the insulating substrate, and a sensing layer formed of a semiconductor oxide nanofiber-nanorod hybrid structure above the metal electrode. The environmental gas sensor can have excellent characteristics of ultra high sensitivity, high selectivity, high responsiveness and low power consumption by forming a semiconductor oxide nanorod having high sensitivity to a specific gas on a semiconductor oxide nanofiber.
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申请公布号 |
US2011227061(A1) |
申请公布日期 |
2011.09.22 |
申请号 |
US20100948022 |
申请日期 |
2010.11.17 |
申请人 |
ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE;INSTITUTE FOR RESEARCH AND INDUSTRY COOPERATION PUSAN NATIONAL UNIVERSITY |
发明人 |
LEE SU JAE;CHO CHAE RYONG |
分类号 |
H01L29/12;B82Y40/00;B82Y99/00;H01L21/64 |
主分类号 |
H01L29/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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