| 摘要 |
PROBLEM TO BE SOLVED: To correct a position shift caused by a substrate position detection mechanism. SOLUTION: The laminated semiconductor device includes: a body; a first stage which has a holding plane for holding a first substrate, and is inhibited from moving to the body in a plane direction of the holding plane, the holding lane being inclined; a second stage which has a holding plane for holding a second substrate, is arranged opposite to the first stage, and moves to the body; and a position correction section which corrects a position of the second substrate in a plane direction at the second stage according to an inclination amount by which the holding plane of the first stage is inclined by making the second substrate abut against the first substrate. COPYRIGHT: (C)2011,JPO&INPIT |
