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发明名称
APPARATUS TO SPUTTER
摘要
申请公布号
KR20110104362(A)
申请公布日期
2011.09.22
申请号
KR20100023465
申请日期
2010.03.16
申请人
SFA ENGINEERING CORP.
发明人
JEONG, HONG GI;YOO, WUN JONG;SHIN, SANG HO;KIM, YOUNG MIN
分类号
C23C14/35;C23C14/34;C23C14/50
主分类号
C23C14/35
代理机构
代理人
主权项
地址
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