IMPROVED MICRO-MACHINED SUSPENSION PLATE WITH INTEGRAL PROOFMASS FOR USE IN SEISMOMETER OR OTHER DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an accelerometer or a seismometer using an in-plane suspension geometry having a suspension plate and at least one fixed capacitive plate.

SOLUTION: The suspension plate 2 is formed from a single piece and includes an external frame, a pair of flexural element assemblies, and an integrated proof mass 8 provided between the assemblies. The flexural elements 6 allow the proof mass 8 to move in the sensitive axis direction in the plane of suspension while restricting movement in all off-axis directions. Off-axis motion of the proof mass 8 is performed by the use of two or more intermediate frames arranged between the flexural elements 6.

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