发明名称 SEMICONDUCTOR MEMORY DEVICE AND MANUFACTURING METHOD THEREOF
摘要 PROBLEM TO BE SOLVED: To solve such a problem of a conventional semiconductor device that the area of a semiconductor chip cannot be reduced sufficiently. SOLUTION: The semiconductor device has: a drain region 13 formed in a flat part of a semiconductor substrate, a source region 10 formed at the upper end of a protrusion formed on the semiconductor substrate; a control gate 12 formed in the upper layer of the flat part in a region partially overlapping the drain region 13; and a floating gate 11 formed in the region adjacent to the control gate 12 and partially covering the flat part, the wall surface of the protrusion, and the source region 10. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011187531(A) 申请公布日期 2011.09.22
申请号 JP20100048785 申请日期 2010.03.05
申请人 RENESAS ELECTRONICS CORP 发明人 NAGAI TAKAAKI
分类号 H01L21/8247;H01L27/115;H01L29/788;H01L29/792 主分类号 H01L21/8247
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