发明名称 MAGNETIC BEARING DEVICE AND MAGNETIC FLOATING STAGE
摘要 PROBLEM TO BE SOLVED: To provide a magnetic bearing device which maintains desired magnetic bearing characteristics even if weight of a floating body to be supported is changed, in a structure provided with an electromagnet and a permanent magnet for sandwiching an electromagnet target. SOLUTION: This thrust magnetic bearing device 100 (magnetic bearing device) includes: the electromagnet target 1 attached to the floating body 110 and formed of magnetic material; the thrust electromagnet 2 including an upper magnetic pole portion 21 and an exciting coil 22, arranged oppositely to the electromagnet target 1, and supporting the electromagnet target 1 by magnetic attraction; and a thrust magnetic pole 3 arranged oppositely to the portion of the electromagnet target 1 on a side opposite to the thrust electromagnet 2, and including the permanent magnet 31 attracting the electromagnet target 1 by the magnetic attraction. The distance between the electromagnet target 1 and the thrust magnetic pole 3 can be adjusted. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011185368(A) 申请公布日期 2011.09.22
申请号 JP20100051834 申请日期 2010.03.09
申请人 YASKAWA ELECTRIC CORP 发明人 MISU KEIJIRO
分类号 F16C32/04;G12B5/00 主分类号 F16C32/04
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