GROUNDING STRUCTURE, AND HEATER AND CHEMICAL VAPOR DEPOSITION APPARATUS HAVING THE SAME

摘要

The present invention relates to a grounding structure, and a heater and a chemical vapor deposition apparatus having the same. The grounding structure comprises: a grounding mount having a housing for receiving a grounding connector that serves to guide a ground current to a ground receiver; a grounding clamp located at the housing, the grounding clamp having a cylindrical form with an open portion to communicate inside and outside and holding a grounding connector in such a manner as to bring the surface and inner surface of the grounding connector into contact with each other; a pair of jaws protruding from the outer surface close to the open portion and extending in parallel with the outer surface, while keeping a distance from each other as much as the width of the open portion; an interference reinforcing member fastened to the jaws, for reinforcing the bonding force between the grounding clamp and the grounding connector; and a ground wire for connecting the outer surface of the grounding clamp with the grounding mount to transfer the ground current to the grounding mount. By increasing the bonding force between the grounding clamp and the grounding connector, it is possible to restrain the formation of a clearance and thus prevent the damage on the grounding connector due to arcing.