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发明名称
METHOD FOR FORMING SILICON OXIDE FILM
摘要
申请公布号
KR20110104186(A)
申请公布日期
2011.09.22
申请号
KR20100023168
申请日期
2010.03.16
申请人
SNU R&DB FOUNDATION
发明人
KIM, SUN JAE;HAN, MIN KOO
分类号
H05B33/10;H01L21/205;H01L29/786
主分类号
H05B33/10
代理机构
代理人
主权项
地址
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