| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent an extreme ultraviolet light source device from deteriorating in light condensing performance due to thermal deformation of a collector mirror assembly. <P>SOLUTION: The collector mirror assembly, used for the extreme ultraviolet light source device, comprises a plurality of reflection shells 21 in shapes of the surfaces of spheroids or the hyperboloids of revolution differing in diameter, and the reflection shells 21 are arranged to be nested and have their ends held by a holding structure 22. A cooling channel through which a refrigerant flows is fitted to the reflection shells 21 on surfaces on back surface sides of reflecting surfaces in axial directions of the reflection shells. The cooling channel serves as a reinforcing material to suppress thermal deformation of the reflection shells 21. Also, molybdenum is used as a material of the reflection shells 21 to suppress the thermal deformation more, and the cooling channel is provided to a holding structure 22 to cool the collector mirror assembly more effectively, thereby the thermal deformation of the collector mirror assembly can be suppressed. <P>COPYRIGHT: (C)2011,JPO&INPIT |
