发明名称 TRANSFER METHOD
摘要 PROBLEM TO BE SOLVED: To prevent an ultraviolet curable resin from being spread more than necessary on a substrate or on the movement terminal end side of a roller. SOLUTION: The pattern forming surface of a sheet shape mold 3 with a fine transfer pattern formed thereon is opposed to the ultraviolet curable resin 2 arranged on the substrate 1. In a state that the mold 3 is pressurized against the ultraviolet curable resin by a pressure member 7, at least one of the pressure member 7 and the substrate 1 is relatively and linearly moved with respect to the other. During the movement, the ultraviolet curable resin 2 is cured so as to transfer the transfer pattern to the ultraviolet curable resin 2. The ultraviolet curable resin 2 is arranged on the substrate 1 so as to make the amount of the ultraviolet curable resin 2 on the side of the movement terminal end 9 in a movement direction M smaller than the amount of the ultraviolet curable resin 2 on the side of a movement start end 8. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011187649(A) 申请公布日期 2011.09.22
申请号 JP20100050802 申请日期 2010.03.08
申请人 TOSHIBA MACH CO LTD 发明人 FUJIWARA SHIGERU;KOKUBO MITSUNORI;SUGIURA HIROYOSHI;INABA KENJI;OGIWARA MAYUKO
分类号 H01L21/027;B29C59/02 主分类号 H01L21/027
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