| 摘要 |
PROBLEM TO BE SOLVED: To provide a transfer system for stably sucking, holding, and transferring plural types of plate-like objects having shapes different from each other, and to provide a transfer method and a thin-film forming device. SOLUTION: The transfer system has a rotary table 4, on which a first object 2 to be transferred and a second object 3 to be transferred are placed, each suction member 40, having a suction hole on the suction surface in contact with the object to be transferred, and a moving mechanism 21 for moving the suction members 40 in the radial direction of the rotating table 4. The suction hole is configured to suck the object to be transferred in a state that the object to be transferred is brought into contact with the suction surface by reducing air pressure inside the suction hole. A first suckable region is the outer surface of the object 2 to be transferred and it can be sucked by the suction hole. A second suckable region is the outer surface of the object 3 to be transferred and it can be sucked by the suction hole. When the shapes of the first/second suckable regions are superposed on each other, an overlapped region is formed. The first gravity center calculated from the overlapped region and the second gravity center of an opening region of the suction hole are on almost the same perpendicular line in either case of sucking the object 2 to be transferred or sucking the object 3 to be transferred by the suction member 40. COPYRIGHT: (C)2011,JPO&INPIT |
