| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate housing container that causes air flow in a housing space of a substrate by means of a simple structure without requiring any large-scale device, thereby capable of maintaining an inside thereof in a clean state. SOLUTION: The substrate housing container includes: a container body including an opening and capable of housing a substrate through the opening; a lid closing the opening of the container body; and a conveyance member attached to the container body. The substrate housing container is provided with an inlet port introducing air inside the substrate housing container in conveying the substrate housing container, a filter filtering air flowing in through the inlet port, and an exhaust port exhausting air in the substrate housing container outside. COPYRIGHT: (C)2011,JPO&INPIT |
