| 摘要 |
Some embodiments provide a physical vapor deposition process for forming a coating on a substrate of an ophthalmic lens in a vacuum deposition chamber. The process can include depositing a multilayer interference stack having a plurality of low refractive index layers and a plurality of high refractive index layers on the substrate by: depositing one or more of the plurality of high refractive index layers by contacting the substrate with a vapor phase pulse of one or more high refractive index source chemicals simultaneously while contacting the substrate with an energetic ion beam generated by an ion source; and depositing each of the plurality of low refractive index layers by contacting the substrate with a vapor phase pulse of one or more low refractive index source chemicals.
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