| 摘要 |
Method of characterizing a crystalline specimen (E), characterized in that it comprises the steps consisting in: a) directing a substantially mono-energetic beam (F1) of projectiles chosen from atoms and ions onto a surface, called the top surface, of said specimen, the direction of propagation of said beam being characterized by an angle of incidence (?i) and by what is called an azimuthal angle (?) measured in the plane of said surface, the energy of said projectiles being equal to or greater than 50 keV; b) the projectiles scattered by the specimen are filtered in terms of energy, those of said projectiles that are scattered with a defined energy are detected and their scattering angle (?d), defined in a plane perpendicular to said top surface of the specimen, is measured; c) steps a) and b) are repeated for a number of different values of said azimuthal angle; and d) an image representative of the number of detected projectiles as a function of the scattering angle and of said azimuthal angle is constructed. Computer program product specifically designed for implementing such a method. |
