发明名称 Photovoltaic cell with thick silicon oxide and silicon nitride passivation fabrication
摘要 <p>A method for the production of a photovoltaic device, for instance solar cell, is disclosed, comprising the steps of providing a substrate having a front main surface and a rear surface; depositing a dielectric layer on the rear surface, wherein the dielectric layer has a thickness larger than 100 nm; depositing a passivation layer comprising hydrogenated SiN on top of the dielectric layer and forming back contacts through the dielectric layer and the passivation layer. A method for the production of a photovoltaic device, for instance solar cell, is also disclosed, comprising the steps of providing a substrate having a front main surface and a rear surface; depositing a dielectric layer stack on the rear surface, wherein the dielectric layer stack comprises a sub-stack of dielectric layers, the sub-stack having a thickness larger than 100 nm, the dielectric layer stack having a thickness larger than 200 nm; and forming back contacts through the dielectric layer stack. Corresponding photovoltaic devices, for instance solar cell devices, are also disclosed.</p>
申请公布号 AU2006224719(B2) 申请公布日期 2011.09.22
申请号 AU20060224719 申请日期 2006.03.16
申请人 IMEC 发明人 BEAUCARNE, GUY;CHOULAT, PATRICK;AGOSTINELLI, GUIDO
分类号 H01L31/18;H01L31/02;H01L31/0216;H01L31/0224 主分类号 H01L31/18
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