HEATING DEVICE, AND METHOD OF MANUFACTURING HEATING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a heating device that is easy to assemble and maintains airtightness of a gap formed between stack layers of a shell, and to provide a method of manufacturing the heating device. SOLUTION: A processing chamber for processing substrates is provided in the shell 50 formed by stacking a plurality of cylindrical shell units 51. A heater 20 is supported at an inner periphery of the shell 50 and heats the substrates. The gap 50s formed between stack layers of the shell units 51 is sealed with a deformable sealing member 52. A first collar 53 which protrudes toward an outer periphery of the shell 50 is provided nearby an end of a shell unit 51. A second collar 59 which protrudes toward the outer periphery of the shell 50 is provided nearby an end of a shell unit 51 which faces the end of the shell unit 51 across the gap 50s. The sealing member 52 is arranged between the first collar 53 and second collar 59. The first collar 53 includes a regulating part 53b which regulates a movement of the sealing member 52 to the outside of the cylindrical shape. COPYRIGHT: (C)2011,JPO&INPIT