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发明名称
GAS DISTRIBUTION UNIT AND UPRIGHT TYPE DEPOSITION APPARATUS HAVING THE GAS DISTRIBUTION UNIT
摘要
申请公布号
KR20110104219(A)
申请公布日期
2011.09.22
申请号
KR20100023231
申请日期
2010.03.16
申请人
K.C.TECH CO., LTD.
发明人
SHIN, IN CHUL;KIM, KYUNG JOON;KIM, HYUNG IL;JUN, YOUNG SU;SUNG, MYUNG EUN
分类号
H05B33/10;C23C16/44;C23C16/455
主分类号
H05B33/10
代理机构
代理人
主权项
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