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发明名称
EXCIMER LASER ANNEALING APPARATUS USING MULTI LASER BEAM
摘要
申请公布号
KR101066656(B1)
申请公布日期
2011.09.21
申请号
KR20110062835
申请日期
2011.06.28
申请人
DUCKIN CO., LTD.
发明人
LIM, JAE SUN;JUNG, YUN HO;YOO, JEA SEON;SEONG, KYEONG YOUN;LIM, WON CHEOL
分类号
H01L21/324;H01L21/268
主分类号
H01L21/324
代理机构
代理人
主权项
地址
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