发明名称
摘要 To provide a monolithic piezoelectric element that can be easily manufactured while the stack is prevented from being mechanically broken by stress. The monolithic piezoelectric element includes a stack 10, and the stack 10 includes a crack-forming conductive layer 13 for forming a small crack therein. The small crack alleviates stress, thereby preventing the occurrence of such a large crack as extends to the piezoelectrically active region.
申请公布号 JP4775372(B2) 申请公布日期 2011.09.21
申请号 JP20070503589 申请日期 2005.12.22
申请人 发明人
分类号 H01L41/083;H01L41/187;H01L41/22;H01L41/273;H01L41/39 主分类号 H01L41/083
代理机构 代理人
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